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High-Q above-IC inductors and transmission lines - comparison to Cu back-end performance

dc.contributor.authorCarchon, Geert
dc.contributor.authorSun, Xiao
dc.contributor.authorDe Raedt, Walter
dc.date.accessioned2021-10-15T12:49:35Z
dc.date.available2021-10-15T12:49:35Z
dc.date.issued2004-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8657
dc.sourceIIOimport
dc.titleHigh-Q above-IC inductors and transmission lines - comparison to Cu back-end performance
dc.typeProceedings paper
dc.contributor.imecauthorSun, Xiao
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.source.peerreviewyes
dc.source.beginpage1118
dc.source.endpage1123
dc.source.conferenceProceedings 54th Electronic Components and Technology Conference
dc.source.conferencedate1/06/2004
dc.source.conferencelocationLas Vegas, NV USA
imec.availabilityPublished - imec


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