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Integrated scatterometry for contact hole monitoring

dc.contributor.authorCheng, Shaunee
dc.contributor.authorStorms, Greet
dc.contributor.authorBaudemprez, Bart
dc.contributor.authorBarry, K.
dc.date.accessioned2021-10-15T12:51:25Z
dc.date.available2021-10-15T12:51:25Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8675
dc.sourceIIOimport
dc.titleIntegrated scatterometry for contact hole monitoring
dc.typeProceedings paper
dc.contributor.imecauthorBaudemprez, Bart
dc.source.peerreviewno
dc.source.conference5th European Advanced Equipment Control / Advanced Process Control (APC/AEC) Conference
dc.source.conferencedate13/04/2004
dc.source.conferencelocationDresden Duitsland
imec.availabilityPublished - imec
imec.internalnotesCD-ROM proceedings


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