Modification of nanoporous silica structures by fluorocarbon plasma treatment

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Authors
Cho, W.; Saxena, R.; Rodriguez, O.; Achanta, R.; Ojha, M.; Plawsky, J.L.; Gill, W.N.; Baklanov, Mikhaïl
Conference
Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics
Title
Modification of nanoporous silica structures by fluorocarbon plasma treatment
Publication type
Proceedings paper
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