Publication:

Nitrogen analysis in high-k stack layers: a challenge

Date

2004

Journal article

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Author(s)

Conard, Thierry

;

Vandervorst, Wilfried

;

De Witte, Hilde

;

Van Elshocht, Sven

Journal

Applied Surface Science

Statistics

1950 since deposited on 2021-10-15

Acq. date: 2026-02-24