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Articles
Nitrogen analysis in high-k stack layers: a challenge
Publication:
Nitrogen analysis in high-k stack layers: a challenge
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Conard, Thierry
;
Vandervorst, Wilfried
;
De Witte, Hilde
;
Van Elshocht, Sven
Journal
Applied Surface Science
Abstract
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1951
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Acq. date: 2026-03-17
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Statistics
Views
1951
since deposited on 2021-10-15
1
last month
1
last week
Acq. date: 2026-03-17
Citations