dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | De Witte, Hilde | |
dc.contributor.author | Van Elshocht, Sven | |
dc.date.accessioned | 2021-10-15T12:56:09Z | |
dc.date.available | 2021-10-15T12:56:09Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8716 | |
dc.source | IIOimport | |
dc.title | Nitrogen analysis in high-k stack layers: a challenge | |
dc.type | Journal article | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.source.peerreview | no | |
dc.source.beginpage | 581 | |
dc.source.endpage | 584 | |
dc.source.journal | Applied Surface Science | |
dc.source.volume | 231-232 | |
imec.availability | Published - imec | |
imec.internalnotes | Paper from the 14th Int. Conf. on Secondary Ion Mass Spectrometry and Related Topics; San Diego; Sept. 2003 | |