Authors

De Coster, Jeroen; Tilmans, Harrie; van Beek, J.T.M.; Rijks, T.G.S.M.; Puers, Bob

Issue

9

Journal

Journal of Micromechanics and Microengineering

Volume

14

Title

The influence of mechanical shock on the operation of electrostatically driven RF-MEMS switches

Publication type

Journal article