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The influence of mechanical shock on the operation of electrostatically driven RF-MEMS switches

dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorTilmans, Harrie
dc.contributor.authorvan Beek, J.T.M.
dc.contributor.authorRijks, T.G.S.M.
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-15T13:00:54Z
dc.date.available2021-10-15T13:00:54Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8754
dc.sourceIIOimport
dc.titleThe influence of mechanical shock on the operation of electrostatically driven RF-MEMS switches
dc.typeJournal article
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpageS49
dc.source.endpageS54
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue9
dc.source.volume14
imec.availabilityPublished - imec


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