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A general and simplified method for rapid evolution of electrostatic switches with varying geometries

dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorTilmans, Harrie
dc.contributor.authorvan Beek, J.T.M.
dc.contributor.authorRijks, T.G.S.M.
dc.contributor.authorSteeneken, P.G.
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-15T13:01:19Z
dc.date.available2021-10-15T13:01:19Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8757
dc.sourceIIOimport
dc.titleA general and simplified method for rapid evolution of electrostatic switches with varying geometries
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage502
dc.source.endpage503
dc.source.conferenceTechnical Digest of Eurosensors XVIII
dc.source.conferencedate12/09/2004
dc.source.conferencelocationRome Italy
imec.availabilityPublished - imec


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