Publication:

Scaling of HF-based gate dielectrics - intgeration with polysilicon gates

Date

2004
Proceedings Paper
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Author(s)

De Gendt, Stefan  
;
Caymax, Matty  
;
Chen, J.
;
Claes, Martine  
;
Conard, Thierry  
;
Delabie, Annelies  
;
Deweerd, Wim
;
Kaushik, Vidya
;
Kerber, Andreas
;
Kubicek, Stefan  
;
Niwa, M.
;
Pantisano, Luigi
;
Puurunen, Riikka
;
Ragnarsson, Lars-Ake  
;
Schram, Tom  
;
Shimamoto, Yasuhiro
;
Tsai, Wilman
;
Rohr, Erika
;
Van Elshocht, Sven  
;
Vandervorst, Wilfried  
;
Witters, Thomas  
;
Young, Edward
;
Zhao, Chao
;
Heyns, Marc  

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1967 since deposited on 2021-10-15
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