Show simple item record

Characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy

dc.contributor.authorDe Gryse, O.
dc.contributor.authorClauws, P.
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorLebedev, O.I.
dc.contributor.authorVan Landuyt, J.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-15T13:02:21Z
dc.date.available2021-10-15T13:02:21Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8763
dc.sourceIIOimport
dc.titleCharacterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpageG598
dc.source.endpageG605
dc.source.journalJournal of the Electrochemical Society
dc.source.issue9
dc.source.volume151
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record