Authors

De Gryse, O.; Clauws, P.; Vanhellemont, Jan; Lebedev, O.I.; Van Landuyt, J.; Simoen, Eddy; Claeys, Cor

Issue

9

Journal

Journal of the Electrochemical Society

Volume

151

Title

Characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy

Publication type

Journal article