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Characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy
Publication:
Characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy
Date
2004
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Gryse, O.
;
Clauws, P.
;
Vanhellemont, Jan
;
Lebedev, O.I.
;
Van Landuyt, J.
;
Simoen, Eddy
;
Claeys, Cor
Journal
Journal of the Electrochemical Society
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1885
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1885
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations