Publication:
Characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy
Date
| dc.contributor.author | De Gryse, O. | |
| dc.contributor.author | Clauws, P. | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.contributor.author | Lebedev, O.I. | |
| dc.contributor.author | Van Landuyt, J. | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-15T13:02:21Z | |
| dc.date.available | 2021-10-15T13:02:21Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8763 | |
| dc.source.beginpage | G598 | |
| dc.source.endpage | G605 | |
| dc.source.issue | 9 | |
| dc.source.journal | Journal of the Electrochemical Society | |
| dc.source.volume | 151 | |
| dc.title | Characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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