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Novel devices on SOI: process integration and manufacturing challenges

dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-15T13:04:16Z
dc.date.available2021-10-15T13:04:16Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8776
dc.sourceIIOimport
dc.titleNovel devices on SOI: process integration and manufacturing challenges
dc.typeOral presentation
dc.contributor.imecauthorDe Meyer, Kristin
dc.source.peerreviewno
dc.source.conferenceIEEE International SOI Conference: Short Course on Novel Devices on SOI
dc.source.conferencedate4/10/2004
dc.source.conferencelocationCharleston, VA USA
imec.availabilityPublished - imec


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