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Instrumentation and methodology for MEMS testing, reliability assessment and failure analysis.

dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-15T13:07:56Z
dc.date.available2021-10-15T13:07:56Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8802
dc.sourceIIOimport
dc.titleInstrumentation and methodology for MEMS testing, reliability assessment and failure analysis.
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage57
dc.source.endpage63
dc.source.conferenceProceedings 24th International Conference on Microelectronics - MIEL
dc.source.conferencedate16/05/2004
dc.source.conferencelocationNis Serbia and Montenegro
imec.availabilityPublished - imec


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