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The reliability of RF-MEMS: failure modes, test procedures and instrumentation.

dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-15T13:08:04Z
dc.date.available2021-10-15T13:08:04Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8803
dc.sourceIIOimport
dc.titleThe reliability of RF-MEMS: failure modes, test procedures and instrumentation.
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage8
dc.source.conferenceReliability, Testing and Characterizations of MEMS/MOEMS III
dc.source.conferencedate26/01/2004
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 5343


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