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Low frequency direct-PECVD SiNx films for rear surface passivation

dc.contributor.authorDe Wolf, Stefaan
dc.contributor.authorAgostinelli, Guido
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorVitanov, P.
dc.date.accessioned2021-10-15T13:08:36Z
dc.date.available2021-10-15T13:08:36Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8807
dc.sourceIIOimport
dc.titleLow frequency direct-PECVD SiNx films for rear surface passivation
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conference14th Workshop on Crystalline Silicon Solar Cells & Modules: Materials and Processes
dc.source.conferencedate8/08/2004
dc.source.conferencelocationWinter Park, CO USA
imec.availabilityPublished - imec


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