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Reliability issues in high-k stacks

dc.contributor.authorDegraeve, Robin
dc.contributor.authorCrupi, Felice
dc.contributor.authorHoussa, Michel
dc.contributor.authorKwak, Dong Hwa
dc.contributor.authorKerber, Andreas
dc.contributor.authorCartier, Eduard
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorRoussel, Philippe
dc.contributor.authorAutran, Jean-Luc
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorPantisano, Luigi
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-15T13:10:16Z
dc.date.available2021-10-15T13:10:16Z
dc.date.issued2004-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8818
dc.sourceIIOimport
dc.titleReliability issues in high-k stacks
dc.typeProceedings paper
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage70
dc.source.endpage71
dc.source.conferenceExtended Abstracts of the International Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate15/09/2004
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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