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Potential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey
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Potential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey
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Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Deweerd, Wim
;
Kaushik, Vidya
;
Chen, J.
;
Shimamoto, Y.
;
Ragnarsson, Lars-Ake
;
Delabie, Annelies
;
Pantisano, Luigi
;
Eyckens, Brenda
;
Maes, J.W.
;
De Gendt, Stefan
;
Heyns, Marc
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1959
since deposited on 2021-10-15
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Acq. date: 2026-01-09
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Views
1959
since deposited on 2021-10-15
1
last month
1
last week
Acq. date: 2026-01-09
Citations