Authors

Deweerd, Wim; Kaushik, Vidya; Chen, J.; Shimamoto, Y.; Ragnarsson, Lars-Ake; Delabie, Annelies; Pantisano, Luigi; Eyckens, Brenda; Maes, J.W.; De Gendt, Stefan; Heyns, Marc

Conference

13th Workshop on Dielectrics in Microelectronics - WODIM

Title

Potential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey

Publication type

Proceedings paper