Assessing the performance of two-dimensional dopant profiling techniques

Thumbnail
Metadata
Show full item record
Authors
Duhayon, Natasja; Eyben, Pierre; Fouchier, Marc; Clarysse, Trudo; Vandervorst, Wilfried; Álvarez, D.; Schoemann, S.; Ciappa, M.; Stangoni, M.; Fichtner, W.; Formanek, P.; Kittler, M.; Raineri, V.; Giannazzo, F.; Goghero, D.; Rosenwaks, Y.; Shikler, R.; Saraf, S.; Sadewasser, S.; Barreau, N.; Glatzel, T.; Verheijen, M.; Mentink, S.A.M.; von Sprekelsen, M.; Maltezopoulos, T.; Wiesendanger, R.; Hellemans, L.
Issue
1
Journal
Journal of Vacuum Science and Technology
Volume
22
Title
Assessing the performance of two-dimensional dopant profiling techniques
Publication type
Journal article
Collections