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Assessing the performance of two-dimensional dopant profiling techniques

dc.contributor.authorDuhayon, Natasja
dc.contributor.authorEyben, Pierre
dc.contributor.authorFouchier, Marc
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorÁlvarez, D.
dc.contributor.authorSchoemann, S.
dc.contributor.authorCiappa, M.
dc.contributor.authorStangoni, M.
dc.contributor.authorFichtner, W.
dc.contributor.authorFormanek, P.
dc.contributor.authorKittler, M.
dc.contributor.authorRaineri, V.
dc.contributor.authorGiannazzo, F.
dc.contributor.authorGoghero, D.
dc.contributor.authorRosenwaks, Y.
dc.contributor.authorShikler, R.
dc.contributor.authorSaraf, S.
dc.contributor.authorSadewasser, S.
dc.contributor.authorBarreau, N.
dc.contributor.authorGlatzel, T.
dc.contributor.authorVerheijen, M.
dc.contributor.authorMentink, S.A.M.
dc.contributor.authorvon Sprekelsen, M.
dc.contributor.authorMaltezopoulos, T.
dc.contributor.authorWiesendanger, R.
dc.contributor.authorHellemans, L.
dc.date.accessioned2021-10-15T13:17:50Z
dc.date.available2021-10-15T13:17:50Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8865
dc.sourceIIOimport
dc.titleAssessing the performance of two-dimensional dopant profiling techniques
dc.typeJournal article
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage385
dc.source.endpage393
dc.source.journalJournal of Vacuum Science and Technology
dc.source.issue1
dc.source.volume22
imec.availabilityPublished - imec


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