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Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

dc.contributor.authorDumon, Pieter
dc.contributor.authorBogaerts, Wim
dc.contributor.authorWiaux, Vincent
dc.contributor.authorWouters, Johan M. D.
dc.contributor.authorBeckx, Stephan
dc.contributor.authorVan Campenhout, Jan
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorLuyssaert, Bert
dc.contributor.authorBienstman, Peter
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-15T13:18:36Z
dc.date.available2021-10-15T13:18:36Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8869
dc.sourceIIOimport
dc.titleLow-loss SOI photonic wires and ring resonators fabricated with deep UV lithography
dc.typeJournal article
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorWouters, Johan M. D.
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorBienstman, Peter
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewno
dc.source.beginpage1328
dc.source.endpage1330
dc.source.journalIEEE Photonics Technology Letters
dc.source.issue5
dc.source.volume16
imec.availabilityPublished - imec


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