Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

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Authors

Dumon, Pieter; Bogaerts, Wim; Wiaux, Vincent; Wouters, Johan M. D.; Beckx, Stephan; Van Campenhout, Jan; Taillaert, Dirk; Luyssaert, Bert; Bienstman, Peter; Van Thourhout, Dries; Baets, Roel

Issue

5

Journal

IEEE Photonics Technology Letters

Volume

16

Title

Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

Publication type

Journal article

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