Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

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Author(s)

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Wouters, Johan M. D.

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Van Campenhout, Jan

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Taillaert, Dirk

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Luyssaert, Bert

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Bienstman, Peter

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Van Thourhout, Dries

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Journal

IEEE Photonics Technology Letters

Metrics

1933 since deposited on 2021-10-15

Acq. date: 2025-10-23