Publication:

Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

Date

2004
Journal article
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dc.contributor.authorDumon, Pieter
dc.contributor.authorBogaerts, Wim
dc.contributor.authorWiaux, Vincent
dc.contributor.authorWouters, Johan M. D.
dc.contributor.authorBeckx, Stephan
dc.contributor.authorVan Campenhout, Jan
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorLuyssaert, Bert
dc.contributor.authorBienstman, Peter
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorWouters, Johan M. D.
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorBienstman, Peter
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-15T13:18:36Z
dc.date.available2021-10-15T13:18:36Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8869
dc.source.beginpage1328
dc.source.endpage1330
dc.source.issue5
dc.source.journalIEEE Photonics Technology Letters
dc.source.volume16
dc.title

Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

dc.typeJournal article
dspace.entity.typePublication
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