Authors

Eneman, Geert; Verheyen, Peter; Rooyackers, Rita; Delhougne, Romain; Loo, Roger; Caymax, Matty; Meunier-Beillard, Philippe; De Meyer, Kristin; Vandervorst, Wilfried

Conference

Program and Abstracts Book 2nd International SiGe Technology and Device Meeting - ISTDM

Title

Fabrication of strained Si NMOS transistors on thin buffer layers with selective and non-selective epitaxial growth techniques

Publication type

Meeting abstract