Show simple item record

Inhibition of galvanic corrosion of WNC barrier metal for reliable Cu CMP

dc.contributor.authorErnur, Didem
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T13:22:04Z
dc.date.available2021-10-15T13:22:04Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8889
dc.sourceIIOimport
dc.titleInhibition of galvanic corrosion of WNC barrier metal for reliable Cu CMP
dc.typeProceedings paper
dc.contributor.imecauthorErnur, Didem
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceAIChE Annual Meeting: Interfacial Phenomena in Semiconductor Processing
dc.source.conferencedate7/11/2004
dc.source.conferencelocationAustin, TX USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record