High resolution electrical characterization of advanced CMOS devices
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Petry, Jasmine | |
dc.contributor.author | Janssens, Tom | |
dc.contributor.author | Fukutome, H. | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-15T13:23:28Z | |
dc.date.available | 2021-10-15T13:23:28Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8897 | |
dc.source | IIOimport | |
dc.title | High resolution electrical characterization of advanced CMOS devices | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.source.peerreview | no | |
dc.source.beginpage | S4-3-76 | |
dc.source.conference | Seeing at the Nanoscale II | |
dc.source.conferencedate | 13/10/2004 | |
dc.source.conferencelocation | Grenoble France | |
imec.availability | Published - imec | |
imec.internalnotes | CD-ROM proceedings |
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