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Topside release of atomic force microscopy probes with molded diamond tips

dc.contributor.authorFouchier, Marc
dc.contributor.authorEyben, Pierre
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T13:25:40Z
dc.date.available2021-10-15T13:25:40Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8910
dc.sourceIIOimport
dc.titleTopside release of atomic force microscopy probes with molded diamond tips
dc.typeOral presentation
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.source.peerreviewno
dc.source.conferenceMicro- and Nanoengineering Conference
dc.source.conferencedate19/09/2004
dc.source.conferencelocationRotterdam The Netherlands
imec.availabilityPublished - imec


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