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A SU-8 liquid cell for surface acoustic wave biosensors

dc.contributor.authorFrancis, Laurent
dc.contributor.authorFriedt, Jean-Michel
dc.contributor.authorBartic, Carmen
dc.contributor.authorCampitelli, Andrew
dc.date.accessioned2021-10-15T13:26:31Z
dc.date.available2021-10-15T13:26:31Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8915
dc.sourceIIOimport
dc.titleA SU-8 liquid cell for surface acoustic wave biosensors
dc.typeProceedings paper
dc.contributor.imecauthorBartic, Carmen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage353
dc.source.endpage363
dc.source.conferenceMEMS, MOEMS, and Micromachining
dc.source.conferencedate26/04/2004
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 5455


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