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Rapid investigation of nanocrystalline diamond vibrating membranes with a stroboscopic interferometer

dc.contributor.authorFrancis, Laurent
dc.contributor.authorKromka, Alexander
dc.contributor.authorSteinmuller-Nethl, Doris
dc.contributor.authorBertrand, Patrick
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-15T13:27:16Z
dc.date.available2021-10-15T13:27:16Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8919
dc.sourceIIOimport
dc.titleRapid investigation of nanocrystalline diamond vibrating membranes with a stroboscopic interferometer
dc.typeProceedings paper
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewno
dc.source.beginpage146
dc.source.endpage149
dc.source.conferenceProceedings of the IEEE Sensors Conference
dc.source.conferencedate25/10/2004
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - imec


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