Rapid investigation of nanocrystalline diamond vibrating membranes with a stroboscopic interferometer
dc.contributor.author | Francis, Laurent | |
dc.contributor.author | Kromka, Alexander | |
dc.contributor.author | Steinmuller-Nethl, Doris | |
dc.contributor.author | Bertrand, Patrick | |
dc.contributor.author | Van Hoof, Chris | |
dc.date.accessioned | 2021-10-15T13:27:16Z | |
dc.date.available | 2021-10-15T13:27:16Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8919 | |
dc.source | IIOimport | |
dc.title | Rapid investigation of nanocrystalline diamond vibrating membranes with a stroboscopic interferometer | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Van Hoof, Chris | |
dc.source.peerreview | no | |
dc.source.beginpage | 146 | |
dc.source.endpage | 149 | |
dc.source.conference | Proceedings of the IEEE Sensors Conference | |
dc.source.conferencedate | 25/10/2004 | |
dc.source.conferencelocation | Vienna Austria | |
imec.availability | Published - imec |
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