dc.contributor.author | Goux, Ludovic | |
dc.contributor.author | Menou, N. | |
dc.contributor.author | Lisoni, Judit | |
dc.contributor.author | Schwitters, M. | |
dc.contributor.author | Paraschiv, Vasile | |
dc.contributor.author | Maes, David | |
dc.contributor.author | Zhen, X. | |
dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | Haspeslagh, Luc | |
dc.contributor.author | Wouters, Dirk | |
dc.contributor.author | Muller, C. | |
dc.contributor.author | Caputa, C. | |
dc.contributor.author | Zambrano, R. | |
dc.date.accessioned | 2021-10-15T13:37:55Z | |
dc.date.available | 2021-10-15T13:37:55Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8974 | |
dc.source | IIOimport | |
dc.title | Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Goux, Ludovic | |
dc.contributor.imecauthor | Paraschiv, Vasile | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.imecauthor | Haspeslagh, Luc | |
dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.contributor.orcidimec | Haspeslagh, Luc::0000-0003-3561-3387 | |
dc.source.peerreview | no | |
dc.source.conference | The 16th International Symposium on Integrated Ferroelectrics | |
dc.source.conferencedate | 5/04/2004 | |
dc.source.conferencelocation | Gyeongju Korea | |
imec.availability | Published - imec | |