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dc.contributor.authorGoux, Ludovic
dc.contributor.authorMenou, N.
dc.contributor.authorLisoni, Judit
dc.contributor.authorSchwitters, M.
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorMaes, David
dc.contributor.authorZhen, X.
dc.contributor.authorKaczer, Ben
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorMuller, C.
dc.contributor.authorCaputa, C.
dc.contributor.authorZambrano, R.
dc.date.accessioned2021-10-15T13:37:55Z
dc.date.available2021-10-15T13:37:55Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8974
dc.sourceIIOimport
dc.titleFerroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs
dc.typeOral presentation
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecHaspeslagh, Luc::0000-0003-3561-3387
dc.source.peerreviewno
dc.source.conferenceThe 16th International Symposium on Integrated Ferroelectrics
dc.source.conferencedate5/04/2004
dc.source.conferencelocationGyeongju Korea
imec.availabilityPublished - imec


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