Show simple item record

Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs

dc.contributor.authorGoux, Ludovic
dc.contributor.authorMenou, N.
dc.contributor.authorLisoni, Judit
dc.contributor.authorSchwitters, M.
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorMaes, David
dc.contributor.authorZhen, X.
dc.contributor.authorKaczer, Ben
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorMuller, C.
dc.contributor.authorCaputa, C.
dc.contributor.authorZambrano, R.
dc.date.accessioned2021-10-15T13:37:55Z
dc.date.available2021-10-15T13:37:55Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8974
dc.sourceIIOimport
dc.titleFerroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs
dc.typeOral presentation
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecHaspeslagh, Luc::0000-0003-3561-3387
dc.source.peerreviewno
dc.source.conferenceThe 16th International Symposium on Integrated Ferroelectrics
dc.source.conferencedate5/04/2004
dc.source.conferencelocationGyeongju Korea
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record