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Achievements and challenges for the electrical performance of MOSFETs with high-k gate dielectrics
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Authors
Groeseneken, Guido
;
Pantisano, Luigi
;
Ragnarsson, Lars-Ake
;
Degraeve, Robin
;
Houssa, Michel
;
Kauerauf, Thomas
;
Roussel, Philippe
;
De Gendt, Stefan
;
Heyns, Marc
Conference
Proceedings of the IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits
Title
Achievements and challenges for the electrical performance of MOSFETs with high-k gate dielectrics
Publication type
Proceedings paper
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