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Self assembled airgap structures

dc.contributor.authorGueneau de Mussy, Jean Paul
dc.contributor.authorBeyer, Gerald
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T13:40:40Z
dc.date.available2021-10-15T13:40:40Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8988
dc.sourceIIOimport
dc.titleSelf assembled airgap structures
dc.typeOral presentation
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceWorkshop on Materials for Advanced Metallization - MAM
dc.source.conferencedate7/03/2004
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - imec


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