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Selective sidewall airgap integration for deep submicrometer interconnects
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Authors
Gueneau de Mussy, Jean Paul
;
Richard, Olivier
;
Beyer, Gerald
;
Maex, Karen
Issue
11
Journal
Electrochemical and Solid-State Letters
Volume
7
Title
Selective sidewall airgap integration for deep submicrometer interconnects
Publication type
Journal article
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