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Characterization of the etching of Ge sacrificial layers for surface micromachining of MEMS

dc.contributor.authorHellin Rico, Raquel
dc.contributor.authorDu Bois, Bert
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-15T13:45:22Z
dc.date.available2021-10-15T13:45:22Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9011
dc.sourceIIOimport
dc.titleCharacterization of the etching of Ge sacrificial layers for surface micromachining of MEMS
dc.typeProceedings paper
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage115
dc.source.endpage118
dc.source.conferenceProceedings 15th Micromechanics Europe Workshop
dc.source.conferencedate5/09/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - open access


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