dc.contributor.author | Hellin, David | |
dc.contributor.author | Geens, Veerle | |
dc.contributor.author | Teerlinck, Ivo | |
dc.contributor.author | Rip, Jens | |
dc.contributor.author | Theuwis, Antoon | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Vinckier, Chris | |
dc.date.accessioned | 2021-10-15T13:45:59Z | |
dc.date.available | 2021-10-15T13:45:59Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9014 | |
dc.source | IIOimport | |
dc.title | A Ge matrix removal method for metallic contamination analysis on Ge wafers using TXRF | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Hellin, David | |
dc.contributor.imecauthor | Rip, Jens | |
dc.contributor.imecauthor | Theuwis, Antoon | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | no | |
dc.source.conference | European Conference on X-Ray Spectrometry | |
dc.source.conferencedate | 6/06/2004 | |
dc.source.conferencelocation | Alghero Italy | |
imec.availability | Published - imec | |