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Scaling of Hf-based high-k dielectrics
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Authors
Heyns, Marc
;
Beckx, Stephan
;
Caymax, Matty
;
Chen, J.
;
Claes, Martine
;
Coenegrachts, Bart
;
De Gendt, Stefan
;
Degraeve, R.
;
Delabie, Annelies
;
Deweerd, Wim
;
Groeseneken, Guido
;
Hayashi, Shigenori
;
Henson, Kirklen
;
Hooker, Jacob
;
Houssa, Michel
;
Kauerauf, Thomas
;
Kerber, A.
;
Kwak, Dong Hwa
;
Lander, Rob
;
Lujan, Guilherme
;
Niwa, Masaaki
;
Pantisano, Luigi
;
Puurunen, Riikka
;
Ragnarsson, Lars-Ake
;
Rohr, Erika
;
Schram, Tom
;
Shimamoto, Y.
;
Tsai, Wilman
;
Van Elshocht, Sven
;
Vertommen, Johan
;
Vandervorst, Wilfried
;
Kubicek, Stefan
Conference
International Workshop on Dielectric Thin Films for Future ULSI Devices
Title
Scaling of Hf-based high-k dielectrics
Publication type
Meeting abstract
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