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ALD deposition of high-k and metal gate stacks for advanced CMOS applications
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Authors
Heyns, Marc
;
Beckx, Stephan
;
Caymax, Matty
;
Claes, Martine
;
De Gendt, Stefan
;
Degraeve, Robin
;
Delabie, Annelies
;
Deweerd, Wim
;
Groeseneken, Guido
;
Hooker, Jacob
;
Houssa, Michel
;
Kwak, Dong Hwa
;
Lander, Rob
;
Lujan, Guilherme
;
Maes, Jan
;
Niwa, Masaaki
;
Pantisano, Luigi
;
Puurunen, R.
;
Ragnarsson, Lars-Ake
;
Rohr, Erika
;
Schram, Tom
;
Van Elshocht, Sven
;
Vandervorst, Wilfried
Conference
Atomic Layer Deposition Conference
Title
ALD deposition of high-k and metal gate stacks for advanced CMOS applications
Publication type
Proceedings paper
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