Publication:

ALD deposition of high-k and metal gate stacks for advanced CMOS applications

Date

2004
Proceedings Paper
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Author(s)

Heyns, Marc  
;
Beckx, Stephan  
;
Caymax, Matty  
;
Claes, Martine  
;
De Gendt, Stefan  
;
Degraeve, Robin  
;
Delabie, Annelies  
;
Deweerd, Wim
;
Groeseneken, Guido  
;
Hooker, Jacob
;
Houssa, Michel  
;
Kwak, Dong Hwa
;
Lander, Rob
;
Lujan, Guilherme
;
Maes, Jan  
;
Niwa, Masaaki
;
Pantisano, Luigi
;
Puurunen, R.
;
Ragnarsson, Lars-Ake  
;
Rohr, Erika
;
Schram, Tom  
;
Van Elshocht, Sven  
;
Vandervorst, Wilfried  

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