Show simple item record

Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer

dc.contributor.authorHoechst, A.
dc.contributor.authorScheuerer, R.
dc.contributor.authorStahl, H.
dc.contributor.authorFischer, F.
dc.contributor.authorMetzger, L.
dc.contributor.authorReichenbach, R.
dc.contributor.authorLaermer, F.
dc.contributor.authorKronmueller, S.
dc.contributor.authorWatcham, S.
dc.contributor.authorRusu, Cristina
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorGunn, R.
dc.date.accessioned2021-10-15T13:51:43Z
dc.date.available2021-10-15T13:51:43Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9040
dc.sourceIIOimport
dc.titleStable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage355
dc.source.endpage361
dc.source.journalSensors and Actuators A
dc.source.issue2_3
dc.source.volume114
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record