Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer
dc.contributor.author | Hoechst, A. | |
dc.contributor.author | Scheuerer, R. | |
dc.contributor.author | Stahl, H. | |
dc.contributor.author | Fischer, F. | |
dc.contributor.author | Metzger, L. | |
dc.contributor.author | Reichenbach, R. | |
dc.contributor.author | Laermer, F. | |
dc.contributor.author | Kronmueller, S. | |
dc.contributor.author | Watcham, S. | |
dc.contributor.author | Rusu, Cristina | |
dc.contributor.author | Witvrouw, Ann | |
dc.contributor.author | Gunn, R. | |
dc.date.accessioned | 2021-10-15T13:51:43Z | |
dc.date.available | 2021-10-15T13:51:43Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9040 | |
dc.source | IIOimport | |
dc.title | Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer | |
dc.type | Journal article | |
dc.source.peerreview | no | |
dc.source.beginpage | 355 | |
dc.source.endpage | 361 | |
dc.source.journal | Sensors and Actuators A | |
dc.source.issue | 2_3 | |
dc.source.volume | 114 | |
imec.availability | Published - imec |
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