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Megasonics: a cavitation driven process

dc.contributor.authorHolsteyns, Frank
dc.contributor.authorLee, Kuntack
dc.contributor.authorGraf, S.
dc.contributor.authorPalmans, Roger
dc.contributor.authorVereecke, Guy
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-15T13:52:49Z
dc.date.available2021-10-15T13:52:49Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9045
dc.sourceIIOimport
dc.titleMegasonics: a cavitation driven process
dc.typeOral presentation
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.conference7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate20/09/2004
dc.source.conferencelocationBrussel Belgium
imec.availabilityPublished - imec


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