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A feasibility study of dual damascene porous SiLK resin with spin-on hard masks

dc.contributor.authorHoofman, Romano
dc.contributor.authorMichelon, Julien
dc.contributor.authorVerheijden, G.J.A.M.
dc.contributor.authorWaeterloos, Joost
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorSchmidt, M.O.
dc.contributor.authorDemeurisse, Caroline
dc.contributor.authorVandeweyer, Tom
dc.contributor.authorDemuynck, Steven
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-15T13:53:53Z
dc.date.available2021-10-15T13:53:53Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9050
dc.sourceIIOimport
dc.titleA feasibility study of dual damascene porous SiLK resin with spin-on hard masks
dc.typeProceedings paper
dc.contributor.imecauthorHoofman, Romano
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorDemeurisse, Caroline
dc.contributor.imecauthorVandeweyer, Tom
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecHoofman, Romano::0000-0001-8740-104X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage147
dc.source.endpage151
dc.source.conferenceAdvanced Metallization Conference 2003
dc.source.conferencedate21/10/2003
dc.source.conferencelocationMontreal/Tokyo
imec.availabilityPublished - open access
imec.internalnotesConference Proceedings AMC XIX


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