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Defect generation in high-k gate dielectric stacks under electrical stress: the impact of hydrogen
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Authors
Houssa, Michel
;
Heyns, Marc
;
Stesmans, Andre
Conference
CECAM Workshop on Atomic Processes at Semiconductor-Oxide Interfaces in Microelectronics Devices
Title
Defect generation in high-k gate dielectric stacks under electrical stress: the impact of hydrogen
Publication type
Oral presentation
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