Dislocation nucleation and movement in helium implanted SiGe/Si(001)Heterostructures studied by in-situ TEM
dc.contributor.author | Hueging, N. | |
dc.contributor.author | Luysberg, M. | |
dc.contributor.author | Urban, K. | |
dc.contributor.author | Buca, D. | |
dc.contributor.author | Holländer, B. | |
dc.contributor.author | Mantl, S. | |
dc.contributor.author | Morschbacher, M. | |
dc.contributor.author | Fichner, P.F.P. | |
dc.contributor.author | Loo, Roger | |
dc.contributor.author | Caymax, Matty | |
dc.date.accessioned | 2021-10-15T13:58:52Z | |
dc.date.available | 2021-10-15T13:58:52Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9074 | |
dc.source | IIOimport | |
dc.title | Dislocation nucleation and movement in helium implanted SiGe/Si(001)Heterostructures studied by in-situ TEM | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.source.peerreview | no | |
dc.source.conference | Dislocation Meeting | |
dc.source.conferencedate | 13/09/2004 | |
dc.source.conferencelocation | La Colle-sur-Loup France | |
imec.availability | Published - imec |
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