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Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a SiGe matrix under oxygen irradiation
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Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a SiGe matrix under oxygen irradiation
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Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Huyghebaert, Cedric
;
Conard, Thierry
;
Brijs, Bert
;
Vandervorst, Wilfried
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1844
since deposited on 2021-10-15
Acq. date: 2026-07-20
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Views
1844
since deposited on 2021-10-15
Acq. date: 2026-07-20
Citations