Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a SiGe matrix under oxygen irradiation

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Authors
Huyghebaert, Cedric; Conard, Thierry; Brijs, Bert; Vandervorst, Wilfried
Conference
Proceedings of the 14th Int. Conference on Secondary Ion Mass Spectrometry and Related Topics - SIMS XIV
Title
Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a SiGe matrix under oxygen irradiation
Publication type
Proceedings paper
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