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Ultra-low-k dielectrics in advanced on-chip interconnects: analysis and perspectives for manufacturing and reliability
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Acq. date: 2026-05-18
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Acq. date: 2026-05-18
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1 since deposited on 2021-10-15
Acq. date: 2026-05-18
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1867 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-18
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