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Ultra-low-k dielectrics in advanced on-chip interconnects: analysis and perspectives for manufacturing and reliability
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Acq. date: 2026-08-25
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Acq. date: 2026-08-25
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1 since deposited on 2021-10-15
Acq. date: 2026-08-25
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1872 since deposited on 2021-10-15
3last month
Acq. date: 2026-08-25
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