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Ultra-low-k dielectrics in advanced on-chip interconnects: analysis and perspectives for manufacturing and reliability

dc.contributor.authorIacopi, Francesca
dc.date.accessioned2021-10-15T14:00:05Z
dc.date.available2021-10-15T14:00:05Z
dc.date.issued2004-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9080
dc.sourceIIOimport
dc.titleUltra-low-k dielectrics in advanced on-chip interconnects: analysis and perspectives for manufacturing and reliability
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorMaex, Karen
imec.availabilityPublished - open access


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