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Articles
Challenges for structural stability of ultra-low-k based interconnects
Publication:
Challenges for structural stability of ultra-low-k based interconnects
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Iacopi, Francesca
;
Brongersma, Sywert
;
Vandevelde, Bart
;
Travaly, Youssef
;
Maex, Karen
Journal
Microelectronic Engineering
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