Challenges for structural stability of ultra-low-k based interconnects

View/open

8863.pdf (457.5Kb)

Metadata

Show full item record

Authors

Iacopi, Francesca; Brongersma, Sywert; Vandevelde, Bart; Travaly, Youssef; Maex, Karen

Issue

1

Journal

Microelectronic Engineering

Volume

75

Title

Challenges for structural stability of ultra-low-k based interconnects

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles