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Challenges for structural stability of ultra-low-k based interconnects

dc.contributor.authorIacopi, Francesca
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorVandevelde, Bart
dc.contributor.authorTravaly, Youssef
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T14:00:20Z
dc.date.available2021-10-15T14:00:20Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9081
dc.sourceIIOimport
dc.titleChallenges for structural stability of ultra-low-k based interconnects
dc.typeJournal article
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage54
dc.source.endpage62
dc.source.journalMicroelectronic Engineering
dc.source.issue1
dc.source.volume75
imec.availabilityPublished - open access


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