Publication:
Mechanical and electrical characterization of BCB as a bond&seal material for cavities housing (RF-)MEMS devices
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1882 since deposited on 2021-10-15
1last month
Acq. date: 2026-02-26
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Views
1882 since deposited on 2021-10-15
1last month
Acq. date: 2026-02-26
Citations