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Implications of progressive wear-out for lifetime extrapolation of ultra-thin (EOT~1nm) SiON films

dc.contributor.authorKaczer, Ben
dc.contributor.authorDegraeve, Robin
dc.contributor.authorO'Connor, Robert
dc.contributor.authorRoussel, Philippe
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-15T14:06:31Z
dc.date.available2021-10-15T14:06:31Z
dc.date.issued2004-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9109
dc.sourceIIOimport
dc.titleImplications of progressive wear-out for lifetime extrapolation of ultra-thin (EOT~1nm) SiON films
dc.typeProceedings paper
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.source.peerreviewyes
dc.source.beginpage713
dc.source.endpage716
dc.source.conferenceTechnical Digest International Electron Devices Meeting - IEDM
dc.source.conferencedate12/12/2004
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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